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Author Cygan, A. Z. ♦ Prabhakar, A. ♦ Podlaha-Murphy, E. J. ♦ Murphy, M. C. ♦ Devireddy, R. V.
Sponsorship Microelectromechanical Systems Division
Source The American Society of Mechanical Engineers (ASME) Digital Collection
Content type Text
File Format PDF
Copyright Year ©2004
Language English
Age Range 18 to 22 years ♦ above 22 year
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2004-11-13


Source: The American Society of Mechanical Engineers (ASME) Digital Collection