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Author Lu, M. C. ♦ Hsieh, H. M. ♦ Tseng, F. G. ♦ Chieng, C. C.
Sponsorship Microelectromechanical Systems
Source The American Society of Mechanical Engineers (ASME) Digital Collection
Content type Text
File Format PDF
Copyright Year ©2002
Language English
Age Range 18 to 22 years ♦ above 22 year
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2002-11-17


Source: The American Society of Mechanical Engineers (ASME) Digital Collection