NDLI: Automated interpretation of SEM images

Content Provider	IEEE Xplore Digital Library
Author	Jones, A.G. Taylor, C.J.
Copyright Year	1994
Description	Author affiliation: Dept. of Med. Biophys., Manchester Univ., UK (Jones, A.G.; Taylor, C.J.)
Abstract	An important part of quality control in the fabrication of integrated circuit wafers involves making 3D measurements of the wafer's surface topography. We describe a method for obtaining a dense depth map of the of the surface from a single scanning electron microscope (SEM) image. The depth map gives a complete description of the surface topography, allowing the easy calculation of any measurement required in the quality control process. The technique presented uses a novel scale-space shape-from-shading algorithm. Results are shown for real SEM images and for a synthetic test image. We also describe how the method can be extended to use stereo images in order to achieve greater accuracy in the surface reconstruction.
Starting Page	872
Ending Page	876
File Size	512191
Page Count	5
File Format	PDF
ISBN	0780318625
DOI	10.1109/TENCON.1994.369186
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1994-08-22
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface topography Scanning electron microscopy Optical surface waves Stereo vision Shape Quality control Integrated circuit measurements Performance analysis Electron optics Optical microscopy
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Libarray of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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