NDLI: Micrometer-width damascene copper conductors at ≥10 $MA/cm^{2}$

Content Provider	IEEE Xplore Digital Library
Author	Read, D.T. Geiss, R.H.
Copyright Year	2009
Description	Author affiliation: Materials Reliability Division, National Institute of Standards and Technology, Boulder, Colorado 80305, USA (Read, D.T.; Geiss, R.H.)
Abstract	We have applied high amplitude (∼10 $MA/cm^{2})$ alternating current (AC) at 100 Hz and direct current (DC) to copper interconnect lines with widths in the few-micrometer range covered with a thick layer of SiO. Under our test conditions of Joule heating, the lines typically fail with lifetimes from 100 to 100,000 s, with a well-defined correlation between cyclic temperature range and the logarithm of lifetime. Post-test scanning electron microscopy (SEM) examination reveals substantial voiding and grain growth, particularly in AC tests at the higher cyclic temperature ranges. Lines without the full SiO constraint fail much sooner than the constrained lines for similar cyclic temperature ranges. The less-constrained lines also had surface contours that were not present on the fully constrained lines. Optical observations during the tests indicate that the void generation behavior appears different during the AC and DC tests, with a saturation behavior occurring in the AC tests, sometimes long before failure. The distributed void density in our AC tests was at least as great as that in the DC tests.
Starting Page	1200
Ending Page	1204
File Size	3913111
Page Count	5
File Format	PDF
ISBN	9781424426003
DOI	10.1109/VPPC.2009.5289715
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Copper Conductors Testing Conducting materials Temperature distribution Current density Electromigration Materials reliability Heating Scanning electron microscopy void alternating current fatigue grain
Content Type	Text
Resource Type	Article

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