NDLI: Mechanical characterization of CMOS metal layers

Content Provider	IEEE Xplore Digital Library
Author	Gaspar, J. Smorodin, T. Schmidt, M.E. Bohm, C. Stecher, M. Paul, O.
Copyright Year	2009
Description	Author affiliation: Dept. Microsystems Eng. (IMTEK), University of Freiburg, Germany (Gaspar, J.; Schmidt, M.E.; Paul, O.) \|\| Infineon Technologies AG, Munich, Germany (Smorodin, T.; Bohm, C.; Stecher, M.)
Abstract	This paper reports on the strain rate dependence of the mechanical properties of aluminum-based metallization layers. Evaporated Al, sputtered Al, and multilayers of μm-thick Al films separated by thinner TiN/Ti layers are characterized using the bulge test, the microcompression method and the microtensile technique. Elastic, ductile and fracture parameters are extracted for strain rates dε/dt between $10^{−4}$ to $10^{1}$ $s^{−1}.$ The Young's modulus E of sputtered layers, 59 GPa, is marginally lower than that of evaporated films, 63 GPa. Both fracture strain ε and strength σ of sputtered Al, 5.5% and 79 MPa, respectively, show no significant variation with de/dt, changing to ε = 2.1 % and σ = 200 MPa when such films are stacked with TiN/Ti layers. Regarding evaporated Al, the failure parameters depend strongly on the strain rate: emax decreases from 33.2 to 1.3% and σ increases from 153 to 380 MPa within the entire range of tested dε/dt values.
Starting Page	1706
Ending Page	1709
File Size	3965440
Page Count	4
File Format	PDF
ISBN	9781424441907
e-ISBN	9781424441938
DOI	10.1109/SENSOR.2009.5285761
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Capacitive sensors Mechanical factors Tin Materials testing Tensile strain Etching Metallization Nonhomogeneous media Biomembranes Inorganic materials maximum elongation CMOS metal layers strain rate dependent mechanical properties elastic modulus strength
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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