NDLI: Silicon plasma processing for antireflective micro — Textured surfaces with applications for solar cells

Content Provider	IEEE Xplore Digital Library
Author	Rebigan, R. Avram, A. Craciunoiu, F. Tomescu, R. Budianu, E. Purica, M. Popescu, M.
Copyright Year	2013
Description	Author affiliation: Nat. Inst. for R&D in Microtechnol., Bucharest, Romania (Rebigan, R.; Avram, A.; Craciunoiu, F.; Tomescu, R.; Budianu, E.; Purica, M.; Popescu, M.)
Abstract	In this paper we present the fabrication of antireflective micro-textured silicon surfaces using ICP (Plasmalab System 100 from Oxford Instruments) dry etching processes for silicon pillars (cylinders, clepsydra, needles). Different etching profiles, sizes and shapes have been obtained through the variation of plasma parameters: pressure, gas debit, etching chemical species. The silicon pillars lower the losses by surface reflection of incident radiation and increase the optical active region of the solar cell, hence increasing device's conversion efficiency. The influence of pillars with various profiles, forms, sizes and heights has been investigated by recording the reflectance spectra on the silicon textured wafers in the spectral range of 200 ÷ 900 nm using UV_VIS_NIR spectrophotometer. The spectra analysis has shown that the reflectivity of the textured silicon surface using pillars has decreased to 10%-15% compared with the value of 35% for the silicon untextured surface, in the spectral range 400 nm _ 1000 nm. To control and verify the etching rate and the shape of the structures, we used SEM imaging and characterization.
Starting Page	119
Ending Page	122
File Size	1512137
Page Count	4
File Format	PDF
ISBN	9781467356701
ISSN	1545827X
e-ISBN	9781467356725
DOI	10.1109/SMICND.2013.6688106
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-10-14
Publisher Place	Romania
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Etching Surface texture Photovoltaic cells Reflectivity Needles solar cell ICP plasma processing silicon surface texturization
Content Type	Text
Resource Type	Article

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