NDLI: Ion milling induced ESD damage during MR head fabrication

Content Provider	IEEE Xplore Digital Library
Author	Olson, D.H.
Copyright Year	1998
Description	Author affiliation: Seagate Technol., Minneapolis, MN, USA (Olson, D.H.)
Abstract	An ESD-like damage mechanism relating to ion milling of MR devices at the wafer level has been identified. This failure is seen as an increased incidence of dielectric shorting between reader and shield at an in-process test point and is accompanied by an increase in MR sensor resistance. Beam neutralization conditions from a Kaufman ion source mill during particular wafer fabrication steps are shown to have been responsible for these failures. As the neutralization of the ion beam was inadequate, induced electrical potential differences can build up between the reader and the shield. Even small milling process nonuniformities then allow adequate time to differentially charge the device's reader and shield contacts to several volts. The resulting EOS condition has led to breakdown of the read gap dielectrics. The evidence for these conclusions and the corrective actions required are presented.
Starting Page	332
Ending Page	340
File Size	1029799
Page Count	9
File Format	PDF
ISBN	1878303910
DOI	10.1109/EOSESD.1998.737054
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1998-10-06
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	EOS/ESD Association, Inc.
Subject Keyword	Electrostatic discharge Fabrication Dielectrics Testing Electric resistance Ion sources Milling machines Ion beams Electric potential Contacts
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Mr. Siddhartha Mukherjee siddhartha@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	ndl-support@iitkgp.ac.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Libarray of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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