NDLI: In-line monitoring coverage visualization

Content Provider	IEEE Xplore Digital Library
Author	McNames, J. Whitefield, B. Abercrombie, D.
Copyright Year	2004
Description	Author affiliation: IC Design & Test Lab., Portland State Univ., OR, USA (McNames, J.)
Abstract	In-line monitoring (ILM) is frequently used in semiconductor manufacturing to identify tool faults quickly and to minimize the impact on yield. Due to the expense of ILM only a fraction of the lots processed can be inspected. In practice process engineers devise a sampling plan to select lots for inspection so that 1) the inspection coverage, defined as the proportion of tools included in the inspection sample, is roughly equal to the tool usage and 2) all tools are covered by the inspection sample. This paper describes a new graphical display of tool usage, inspection coverage, and coverage loss that enables process engineers to quickly identify problems with the sampling plan. The displays are a graphical representation of the manufacturing process between inspection steps that show tool usage, inspection coverage, and the difference between usage and coverage.
Sponsorship	SEMI IEEE Micro
Starting Page	135
Ending Page	139
File Size	346935
Page Count	5
File Format	PDF
ISBN	0780383125
DOI	10.1109/ASMC.2004.1309551
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-05-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Monitoring Visualization Inspection Displays Large scale integration Sampling methods Semiconductor device manufacture Logic testing Event detection Integrated circuit testing
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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