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Author Caughman, J. B. ♦ Baity, F. W. ♦ Bigelow, T. S. ♦ Gardner, W. L. ♦ Hoffman, D. J. ♦ Forrester, S. C. ♦ White, T. L.
Sponsorship USDOE
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword PLASMA PHYSICS AND FUSION ♦ OPEN PLASMA DEVICES ♦ MICROWAVE EQUIPMENT ♦ CLOSED PLASMA DEVICES ♦ SINTERING ♦ CERAMICS ♦ MHZ RANGE ♦ GHZ RANGE ♦ PENETRATION DEPTH ♦ SILICON CARBIDES ♦ BORON CARBIDES ♦ TITANIUM CARBIDES ♦ TUNGSTEN CARBIDES ♦ FABRICATION ♦ PROCESSING ♦ DECONTAMINATION ♦ CONCRETES
Abstract The processing of materials using rf and/or microwave power is a broad area that has grown significantly in the past few years. We have applied rf and microwave technology in the areas of ceramic sintering, plasma processing, and waste processing. The sintering of ceramics in the frequency range of 50 MHz-28 GHz has lead to unique material characteristics compared to materials that have been sintered conventionally. It has been demonstrated that sintering can be achieved in a variety of materials, including alumina, zirconia, silicon carbide, and boron carbide. In the area of plasma processing, progress has been made in the development and understanding of high density plasma sources, including inductively coupled plasma (ICP) sources. The effects of processing conditions on the ion energy distribution at the substrate surface (a critical processing issue) have been determined for a variety of process gases. The relationship between modeling and experiment is being established. Microwave technology has also been applied to the treatment of radioactive and chemical waste. The application of microwaves to the removal of contaminated concrete has been demonstrated. Details of these programs and other potential application areas are discussed. {copyright} {ital 1996 American Institute of Physics.}
ISSN 0094243X
Educational Use Research
Learning Resource Type Article
Publisher Date 1996-02-01
Publisher Department Oak Ridge National Laboratory
Publisher Place United States
Volume Number 355
Issue Number 1
Technical Publication No. CONF-9505105-
Organization Oak Ridge National Laboratory


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