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Author Bocko, M. F. ♦ Stephenson, K. A.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword OTHER INSTRUMENTATION ♦ MICROSCOPES ♦ TRANSDUCERS ♦ SENSITIVITY ♦ MATHEMATICAL MODELS ♦ NOISE ♦ SIGNALS ♦ TUNNELING ♦ Miscellaneous Instrumentation- (1990-)
Abstract Displacement transducers based upon quantum mechanical tunneling of electrons can potentially achieve a sensitivity far superior to conventional transducers. The reason for this is that the dynamical influence of the tunneling transducer on a test mass is insignificant compared to that of traditional capacitive, inductive or piezoelectric transducers. Thus the fluctuating back action force becomes dominant as the test mass in miniaturized, thus the tunneling transducer may be especially useful in micro-fabricated sensors. In this paper the authors present an equivalent circuit model for a tunneling transducer including noise and outline a method for calculating the minimum detectable signal in any given application. The authors also discuss some practical limits for tunneling based sensors.
ISSN 0734211X
Educational Use Research
Learning Resource Type Article
Publisher Place United States
Journal Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
Volume Number 9
Issue Number 2


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