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Author Scime, E. E. ♦ Keesee, A. M. ♦ Elliott, D. ♦ Dugas, M. ♦ Ellison, S. ♦ Tersteeg, J. ♦ Wagner, G. ♦ Barrie, A. ♦ Rager, A.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY ♦ PLASMA PHYSICS AND FUSION TECHNOLOGY ♦ COLLIMATORS ♦ DESIGN ♦ DIAGRAMS ♦ ELECTRON BEAMS ♦ ELECTRONS ♦ FIRST WALL ♦ KEV RANGE 01-10 ♦ PLASMA ♦ PLASMA PRODUCTION ♦ PLATES ♦ SILICON ♦ SPECTROMETERS
Abstract A plasma spectrometer design based on advances in lithography and microchip stacking technologies is described. A series of curved plate energy analyzers, with an integrated collimator, is etched into a silicon wafer. Tests of spectrometer elements, the energy analyzer and collimator, were performed with a 5 keV electron beam. The measured collimator transmission and energy selectivity were in good agreement with design targets. A single wafer element could be used as a plasma processing or fusion first wall diagnostic.
ISSN 00346748
Educational Use Research
Learning Resource Type Article
Publisher Date 2016-11-15
Publisher Place United States
Journal Review of Scientific Instruments
Volume Number 87
Issue Number 11


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