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Author Lee, Hojun ♦ Lee, Dasol ♦ Kim, Moonsung ♦ Jeong, Haedo
Source SpringerLink
Content type Text
Publisher Korean Society for Precision Engineering
File Format PDF
Copyright Year ©2017
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations
Subject Keyword CMP ♦ Mixed abrasive slurry ♦ Mixing ratio ♦ Non-spherical colloidal silica ♦ Oxide ♦ Material removal rate ♦ Industrial and Production Engineering ♦ Materials Science
Abstract Colloidal silica and fumed silica are common slurry materials for oxide chemical mechanical polishing (CMP). Non-spherical colloidal silica particles are manufactured via a multi-step feeding method to compensate for the material removal rate of colloidal silica slurry, which is lower than that of fumed silica slurry. Additionally, mixed abrasive slurry has been used by combining non-spherical and spherical colloidal silica particles. Experiments were conducted on a 4-inch wafer with silicon dioxide film (SiO $_{ 2 }$, 1-μm thick) and KOH-based colloidal silica slurry. The slurry had spherical colloidal silica particles with the size of 30 nm and 70 nm and non-spherical colloidal silica particles with the size of 70 nm. Effects of different colloidal particles in the oxide CMP were observed under the same pH condition in order to achieve high material removal rate. The mixing ratios were 2:1, 1:1, and 1:2 respectively. The analysis of the particle combinations showed that the mixing of particles with different sizes caused agglomeration and increased the material removal rate. The relatively smaller spherical particles improved the surface roughness and overall performance, especially when mixed with non-spherical particles. Such mixtures of particles with different sizes and shapes mixed at an appropriate ratio can outperform the fumed silica slurry.
ISSN 22347593
Age Range 18 to 22 years ♦ above 22 year
Educational Use Research
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2017-10-08
Publisher Place Seoul
e-ISSN 20054602
Journal International Journal of Precision Engineering and Manufacturing
Volume Number 18
Issue Number 10
Page Count 6
Starting Page 1333
Ending Page 1338


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Source: SpringerLink