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Author Jang, Pyungwoo ♦ Shin, Seung Chan
Source SpringerLink
Content type Text
Publisher Springer Netherlands
File Format PDF
Copyright Year ©2013
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations
Subject Keyword thin films ♦ sputtering ♦ oxidation ♦ SEM ♦ STANJAN ♦ Metallic Materials ♦ Operating Procedures, Materials Treatment ♦ Magnetism, Magnetic Materials ♦ Engineering Thermodynamics, Heat and Mass Transfer ♦ Characterization and Evaluation of Materials ♦ Continuum Mechanics and Mechanics of Materials
Abstract Fe-5wt%Al films were RF-sputtered and annealed in an atmosphere of hydrogen and water vapor mixture at 1173 K for up to 200 min in order to selectively oxidize aluminum. As the annealing time increased, the morphology of the films changed from the continuous to the discontinuous type; thus, particulate Fe-Al films formed after 100 min. Thermodynamics simulation was performed to determine the ideal conditions for this process. Temperatures exceeding 1073 K are necessary to prevent iron from oxidation confirmed by both the depth profile in XPS and magnetic moment increment in VSM. Annealing the films in an atmosphere with a very low dew point of 77 K did not make the films become particulate. New findings are expected to be applied to the thin film inductors for GHz application as well as to manufacturing process of nanoparticles.
ISSN 15989623
Age Range 18 to 22 years ♦ above 22 year
Educational Use Research
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2013-09-10
Publisher Place Dordrecht
e-ISSN 20054149
Journal Metals and Materials
Volume Number 19
Issue Number 5
Page Count 4
Starting Page 1163
Ending Page 1166


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Source: SpringerLink