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Author Vartapetov, Sergei K. ♦ Gryaznov, O. V. ♦ Malashin, M. V. ♦ Moshkunov, S. I. ♦ Nebogatkin, S. V. ♦ Khasaya, R. R. ♦ Khomich, V. Yu ♦ Yamshchikov, V. A.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ ARGON FLUORIDES ♦ ELECTRIC DISCHARGES ♦ ELECTRIC GENERATORS ♦ ELECTRIC POTENTIAL ♦ FAR ULTRAVIOLET RADIATION ♦ KHZ RANGE ♦ LASERS ♦ MAGNETIC COMPRESSION ♦ OPTICAL PUMPING ♦ PULSES ♦ SEMICONDUCTOR SWITCHES ♦ ARGON COMPOUNDS ♦ COMPRESSION ♦ ELECTRICAL EQUIPMENT ♦ ELECTROMAGNETIC RADIATION ♦ EQUIPMENT ♦ FLUORIDES ♦ FLUORINE COMPOUNDS ♦ FREQUENCY RANGE ♦ HALIDES ♦ HALOGEN COMPOUNDS ♦ PUMPING ♦ RADIATIONS ♦ RARE GAS COMPOUNDS ♦ SEMICONDUCTOR DEVICES ♦ SWITCHES ♦ ULTRAVIOLET RADIATION
Abstract A 193-nm electric-discharge ArF laser pumped by an all-solid-state generator based on a semiconductor switch and a system of magnetic compression of high-voltage pulses is studied. The laser emits 18-ns, 15 mJ pulses at a pulse repetition rate of 1 kHz. (lasers)
ISSN 10637818
Educational Use Research
Learning Resource Type Article
Publisher Date 2009-08-31
Publisher Place United States
Journal Quantum Electronics
Volume Number 39
Issue Number 8


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