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Author Shetty, Smitha ♦ Yang, Jung In ♦ Trolier-McKinstry, Susan ♦ Stitt, Joe
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ CERAMICS ♦ DOPED MATERIALS ♦ ELECTRODES ♦ INTERFEROMETERS ♦ INTERFEROMETRY ♦ LASERS ♦ MICROSCOPES ♦ MICROSCOPY ♦ MONOCRYSTALS ♦ PIEZOELECTRICITY ♦ SPATIAL RESOLUTION ♦ STRAINS ♦ SUBSTRATES ♦ TEMPERATURE RANGE 0273-0400 K ♦ THIN FILMS
Abstract A single beam laser interferometer based on a modified Mirau detection scheme with a vertical resolution of ∼5 pm was developed for localized d{sub 33} measurements on patterned piezoelectric films. The tool provides high spatial resolution (∼2 μm), essential for understanding scaling and processing effects in piezoelectric materials. This approach enables quantitative information on d{sub 33}, currently difficult in local measurement techniques such as piezoresponse force microscopy. The interferometer is built in a custom microscope and employs a phase lock-in technique in order to detect sub-Angstrom displacements. d{sub 33} measurements on single crystal 0.67PbMg{sub 0.33}Nb{sub 0.67}O{sub 3}-0.33PbTiO{sub 3} and bulk PbZrTiO{sub 3}-5A ceramics demonstrated agreement within <3% with measurements using a double beam laser interferometer. Substrate bending contributions to out-of-plane strain, observed in thin continuous PbZr{sub 0.52}Ti{sub 0.48}O{sub 3} films grown on Si substrates is reduced for electrode diameters smaller than 100 μm. Direct scanning across room temperature and 150 °C poled 5 μm and 10 μm features etched in 0.5 μm thick PbZr{sub 0.52}Ti{sub 0.48}O{sub 3} films doped with 1% Nb confirmed minimal substrate contributions to the effective d{sub 33,f}. Furthermore, enhanced d{sub 33,f} values were observed along the feature edges due to partial declamping from the substrate, thus validating the application of single beam interferometry on finely patterned electrodes.
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 2015-11-07
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 118
Issue Number 17


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