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Author Corsaro, R. D. ♦ Klunder, J. D. ♦ Gentilman, R. ♦ Fiore, D.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS ♦ ACCELEROMETERS ♦ ACOUSTIC DETECTION ♦ FABRICATION ♦ ACTUATORS ♦ TRANSDUCERS ♦ SOUND WAVES ♦ DESIGN ♦ PERFORMANCE ♦ SENSITIVITY ♦ PIEZOELECTRIC MATERIALS ♦ ARRAYS
Abstract This paper describes a fabrication approach for producing high-sensitivity low-cost accelerometers. This approach offers the potential for intrinsically combining accelerometers as a dense array within an actuator. Hence sensing and actuation functions can be combined into one co-formed inexpensive transducer array. Results are presented which show that the combined transducer has predictable properties and is well suited for use in sensing, actuation, and active-control applications. {copyright} {ital 1996 American Institute of Physics.}
ISSN 0094243X
Educational Use Research
Learning Resource Type Article
Publisher Date 1996-04-01
Publisher Place United States
Volume Number 368
Issue Number 1
Technical Publication No. CONF-9509298-


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