Thumbnail
Access Restriction
Open

Author Ashby, C. I. ♦ Bridges, M. M. ♦ Allerman, A. A. ♦ Hammons, B. E. ♦ Hou, H. Q.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CHEMISTRY ♦ ALUMINIUM COMPOUNDS ♦ OXIDATION ♦ ALUMINIUM ARSENIDES ♦ GALLIUM ARSENIDES ♦ WET OXIDATION PROCESSES ♦ TIME DEPENDENCE ♦ LASER MATERIALS ♦ RAMAN SPECTRA ♦ SPECTRAL SHIFT
Abstract The time dependence of the wet oxidation of high-Al-content AlGaAs can be either linear, indicating reaction-rate limitation, or parabolic, indicating diffusion-limited rates. The transition from linear to parabolic time dependence can be explained by the increased rate of the formation of intermediate As{sub 2}O{sub 3} versus its reduction to elemental As. A steadily increasing thickness of the As{sub 2}O{sub 3}-containing region at the oxidation front will shift the process from the linear to the parabolic regime. This shift from reaction-rate limited (linear) to diffusion-limited (parabolic) time dependence is favored by increasing temperature or increasing Al mole fraction. {copyright} {ital 1999 American Institute of Physics.}
ISSN 00036951
Educational Use Research
Learning Resource Type Article
Publisher Date 1999-07-01
Publisher Place United States
Journal Applied Physics Letters
Volume Number 75
Issue Number 1


Open content in new tab

   Open content in new tab