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Author Lo, C. ♦ Krishnaswamy, S. V. ♦ Messier, R. ♦ Rao, K. R. P. M.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword MATERIALS SCIENCE ♦ ARGON ♦ IRON NITRIDES ♦ MICROSTRUCTURE ♦ MOESSBAUER EFFECT ♦ SPUTTERING ♦ X-RAY DIFFRACTION ♦ NITROGEN ♦ FILMS ♦ GASES ♦ HIGH VACUUM ♦ INTERFEROMETRY ♦ LASER RADIATION ♦ COHERENT SCATTERING ♦ CRYSTAL STRUCTURE ♦ DIFFRACTION ♦ ELECTROMAGNETIC RADIATION ♦ ELEMENTS ♦ FLUIDS ♦ IRON COMPOUNDS ♦ NITRIDES ♦ NITROGEN COMPOUNDS ♦ NONMETALS ♦ PNICTIDES ♦ RADIATIONS ♦ RARE GASES ♦ SCATTERING ♦ TRANSITION ELEMENT COMPOUNDS ♦ Ceramics, Cermets, & Refractories- Structure & Phase Studies
Abstract We have shown by Moessbuaer spectroscopy and x-ray diffraction that single-phase, small crystallite size films in the Fe--N system (g'-Fe/sub 4/N and Fe/sub 3/N) can be synthesized by varying reactive sputtering conditions in Ar+N/sub 2/ gas mixtures. The g'-Fe/sub 4/N phase can be further produced and controlled by addition of H/sub 2/ to the sputtering gas with single phase films (i.e., no unreacted a-Fe present) obtained only at a 1:3 N/sub 2/:H/sub 2/ mixture. The film microstructures are consistent with the structure zone model classification scheme and show that faceted, high surface area, single phase g'-Fe/sub 4/N and Fe/sub 3/N films can be prepared with crystallite sizes of approx.400--500 A.
Educational Use Research
Learning Resource Type Article
Publisher Date 1981-03-01
Publisher Place United States
Journal J. Vac. Sci. Technol.
Volume Number 18
Issue Number 2
Organization Department of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802


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