Thumbnail
Access Restriction
Open

Author Avasthi, D. K. ♦ Kabiraj, D. ♦ Jain, A. ♦ Mehta, G. K.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS ♦ STAINLESS STEELS ♦ TELESCOPE COUNTERS ♦ NONDESTRUCTIVE ANALYSIS ♦ ION IMPLANTATION ♦ IMPURITIES ♦ ION PROBES ♦ NICKEL IONS ♦ MEV RANGE 10-100 ♦ RECOILS ♦ ELASTIC SCATTERING ♦ BORON ADDITIONS ♦ DEPTH PROFILES
Abstract Conventional elastic recoil detection analysis (ERDA) is considered to be an ideal nondestructive technique for depth profiling of implanted species of light mass elements in a material. The present work shows that it can lead to inaccurate misleading results in the cases where the implanted sample has surface impurity of nearby light mass element. It is also shown that the detector telescope behind the stopper foil in ERDA allows accurate profiling of implanted specimen as well as surface impurities simultaneously. {copyright} {ital 1996 American Institute of Physics.}
ISSN 00346748
Educational Use Research
Learning Resource Type Article
Publisher Date 1996-09-01
Publisher Place United States
Journal Review of Scientific Instruments
Volume Number 67
Issue Number 9


Open content in new tab

   Open content in new tab