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Author Shaing, K. C.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword PLASMA PHYSICS AND FUSION ♦ ELECTRIC DISCHARGES ♦ PLASMA HEATING ♦ KINETIC EQUATIONS ♦ PLASMA PRODUCTION ♦ MAXWELL EQUATIONS ♦ DISTRIBUTION FUNCTIONS ♦ COLLISIONAL PLASMA ♦ INDUCTIVELY COUPLED PLASMA ♦ PLASMA SOURCES
Abstract An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that {nu}{approximately}{omega}. Here, {nu} is the electron collision frequency, and {omega} is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source. {copyright} {ital 1996 American Institute of Physics.}
ISSN 1070664X
Educational Use Research
Learning Resource Type Article
Publisher Date 1996-09-01
Publisher Place United States
Journal Physics of Plasmas
Volume Number 3
Issue Number 9


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