Thumbnail
Access Restriction
Open

Author Wu, Y. P. ♦ Yang, Z. H. ♦ Phouc, Nguyen N. ♦ Ma, Fusheng ♦ Zong, B. Y. ♦ Yang, Yong ♦ Ding, Jun
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ ANISOTROPY ♦ COERCIVE FORCE ♦ DEPOSITION ♦ ISOTROPY ♦ LAYERS ♦ MAGNETIC PROPERTIES ♦ MICA ♦ MICROWAVE RADIATION ♦ PERMEABILITY ♦ RESIDUAL STRESSES ♦ SILICON OXIDES ♦ SPUTTERING ♦ SUBSTRATES ♦ SURFACES ♦ TEMPERATURE RANGE 0273-0400 K ♦ THIN FILMS
Abstract In this study, sheet mica was explored as an alternative substrate for thin film deposition due to its unique layered structure and atomically flat surface. Static magnetic properties and microwave permeability of sputtered FeCoN films on mica with and without SiO{sub 2} under-layer were examined. In-plane isotropy and a large coercivity of 70 Oe were observed for the film directly deposited on mica substrate. With the insertion of 40 nm SiO{sub 2} under-layer between the film and mica substrate, well-defined in-plane anisotropy is formed due to the significant reduce in film residual stress, associated with a 3 Oe coercive force along easy axis. As a result, excellent microwave properties have been achieved and are comparable with the same film on Si substrate. Moreover, the permeability spectra are surprisingly stable from room temperature up to 390 K. Mica is proved as a promising substrate for magnetic films with high microwave performance, which is a great advantage for practical applications. Furthermore, our results provide an effective way to reduce the residual stress in sputtered films.
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 2015-07-07
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 118
Issue Number 1


Open content in new tab

   Open content in new tab