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Author Yassine, A.M. ♦ Chen, T.M. ♦ Bordelon, M.
Sponsorship IEEE Electron Devices Society
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©1963
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Transistors ♦ Electrical resistance measurement ♦ Energy measurement ♦ Temperature ♦ Current density ♦ Noise measurement ♦ Pulse measurements ♦ Electromigration ♦ Density measurement ♦ Current measurement
Abstract In this work, we present a study of resistance transients (pulses) observed during noise measurements in Al-based thin films at high current densities and/or high temperatures. It was found that the maximum pulse height M gradually increases with film current density until it reaches a peak at a critical film temperature, T/sub c/. Above the critical temperature, M decreases to a value close to its initial value then increases with the film current density. It was also found that the critical temperature is 254/spl deg/C for the Al-Si(0.75%)-Cu(0.5%) samples used in this study. In addition, it was found that the number of pulses detected per measurement period increases with increasing film current density. A new technique for determining the electromigration activation energy from the Arrhenius plot of M versus film temperature is also presented. The activation energy values determined using this new technique were between 0.58 and 0.77 eV for the Al-Si(0.75%)-Cu(0.5%) samples.
Description Author affiliation :: Adv. Micro Devices Inc., Austin, TX, USA
ISSN 00189383
Education Level UG and PG
Learning Resource Type Article
Publisher Date 1998-11-01
Publisher Place U.S.A.
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Volume Number 45
Issue Number 11
Size (in Bytes) 108.26 kB
Page Count 4
Starting Page 2375
Ending Page 2378


Source: IEEE Xplore Digital Library