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Author Benetti, M. ♦ Cannata, D. ♦ D'Amico, A. ♦ Di Pietrantonio, F. ♦ Macagnano, A. ♦ Verona, E.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2004
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Surface acoustic waves ♦ Chemical sensors ♦ Acoustic sensors ♦ Acoustic waves ♦ Frequency ♦ Mechanical sensors ♦ Acoustic testing ♦ Acoustic transducers ♦ Piezoelectric transducers ♦ Signal resolution
Abstract In this work we present preliminary results on surface acoustic waves (SAW) chemical sensors based on a new AlN/diamond/Si multilayered structure. The high SAW velocity in diamond allows it to operate at higher frequencies at moderate interdigital transducer (IDT) line-width resolution in order to increase the sensor output signals, with the aim to increase the sensor sensitivity. Aluminium nitride has been chosen as piezoelectric layer because of its high SAW velocity together with excellent electrical, mechanical and chemical properties. The SAW phase velocity in the experimented structure is 10716 m/s for the Sezawa mode, more than three times that in ST-cut quartz. Both SAW delay line and 1-port resonator have been implemented and tested, under the following propagation conditions: acoustic wavelength /spl lambda/=8 /spl mu/m, normalized AlN film thickness h//spl lambda/=0.225, operation frequency f/spl cong/1.35 GHz. The thickness of the diamond layer (22 /spl mu/m) is such that it can be considered as a semi-infinite substrate. The two test structures have been coated by thermal evaporation with a sensible thin (10 nm) layer of Co-tetra-phenyl-porphyrin which allowed us to detect small concentrations of ethanol and CO.
Description Author affiliation: Ist. di Acustica O.M. Corbino, CNR, Rome, Italy (Benetti, M.; Cannata, D.)
ISBN 0780386922
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2004-10-24
Publisher Place Austria
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 405.70 kB
Page Count 4
Starting Page 753
Ending Page 756


Source: IEEE Xplore Digital Library