Access Restriction

Author Il Hwan Cho ♦ Junsoo Kim ♦ Il Han Park ♦ Hyungcheol Shin ♦ Byung-Gook Park ♦ Jong Duk Lee ♦ Jong-Ho Lee
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2005
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword FinFETs ♦ Wet etching ♦ Planarization ♦ Integrated circuit technology ♦ Chemical technology ♦ Paper technology ♦ Dry etching ♦ Anisotropic magnetoresistance ♦ Coatings ♦ Computer science
ISBN 142440083X
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2005-12-07
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 834.66 kB
Page Count 2
Starting Page 420
Ending Page 421

Source: IEEE Xplore Digital Library