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Author Imai, A. ♦ Miyamoto, R. ♦ Ozawa, K.
Sponsorship IEEE Electron Devices Soc.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2001
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Costs ♦ Semiconductor materials ♦ Semiconductor device manufacture ♦ Engineering management ♦ Production facilities ♦ Internet ♦ Manufacturing processes ♦ Manufacturing industries ♦ Lead compounds ♦ Process control
Abstract This paper introduces a way to build a system that supports maintenance work in the most suitable and efficient way for future semiconductor factories with changing technologies. This system not only has improved the working efficiency of a maintenance section greatly, but practical use of the proposed system attained a greater rate of equipment availability, and improvement in maintenance costs. For future growth of the semiconductor industry, greater cooperation between the semiconductor manufacturer, components maker, and equipment maker will be indispensable. We wish to promote cooperation for improvement in the equipment operation rate, including the formation of data sharing schemes using Internet technology and an intranet between semiconductor manufacturer, equipment maker, and material supplier, and common analysis, and the practical use of existing data for a new line with the assistance of this system.
Description Author affiliation: Yasu Semicond. Corp., Shiga, Japan (Imai, A.)
ISBN 0780367316
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2001-10-08
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 512.12 kB
Page Count 4
Starting Page 55
Ending Page 58


Source: IEEE Xplore Digital Library