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Author Teyssieux, D. ♦ Thiery, L. ♦ Cretin, B. ♦ Briand, D. ♦ de Rooij, N.F.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2007
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Charge coupled devices ♦ Charge-coupled image sensors ♦ Spatial resolution ♦ Optical sensors ♦ Costs ♦ Communication standards ♦ Sensor phenomena and characterization ♦ Sensor systems ♦ Thermal sensors ♦ Thermoreflectance
Abstract This communication reports on the thermal characterisation of microsystems using a visible thermography system based on a low cost standard CCD sensor. The interest of such a method in low spatial resolution applications, with the possibility to reach a true spatial resolution inferior to 500 nm, is demonstrated. One interesting point of this optical method is that it is not very sensitive to the optical properties of the object, contrary to thermoreflectance and infrared (IR) thermography. Thermal measurements were performed on micro-heaters commonly used in microsystems, platinum and silicon based micromachined heaters. The paper presents the capability of the method in terms of thermal resolution and spatial resolution, as well as the capacity to quickly obtain static and dynamic thermal images of the studied samples.
Description Author affiliation: FEMTO-ST, Besancon (Teyssieux, D.; Thiery, L.; Cretin, B.)
ISBN 9781424412617
ISSN 19300395
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2007-10-28
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 465.12 kB
Page Count 4
Starting Page 926
Ending Page 929

Source: IEEE Xplore Digital Library