|Author||Teyssieux, D. ♦ Thiery, L. ♦ Cretin, B. ♦ Briand, D. ♦ de Rooij, N.F.|
|Source||IEEE Xplore Digital Library|
|Publisher||Institute of Electrical and Electronics Engineers, Inc. (IEEE)|
|Subject Domain (in DDC)||Technology ♦ Engineering & allied operations ♦ Applied physics|
|Subject Keyword||Charge coupled devices ♦ Charge-coupled image sensors ♦ Spatial resolution ♦ Optical sensors ♦ Costs ♦ Communication standards ♦ Sensor phenomena and characterization ♦ Sensor systems ♦ Thermal sensors ♦ Thermoreflectance|
|Abstract||This communication reports on the thermal characterisation of microsystems using a visible thermography system based on a low cost standard CCD sensor. The interest of such a method in low spatial resolution applications, with the possibility to reach a true spatial resolution inferior to 500 nm, is demonstrated. One interesting point of this optical method is that it is not very sensitive to the optical properties of the object, contrary to thermoreflectance and infrared (IR) thermography. Thermal measurements were performed on micro-heaters commonly used in microsystems, platinum and silicon based micromachined heaters. The paper presents the capability of the method in terms of thermal resolution and spatial resolution, as well as the capacity to quickly obtain static and dynamic thermal images of the studied samples.|
|Description||Author affiliation: FEMTO-ST, Besancon (Teyssieux, D.; Thiery, L.; Cretin, B.)|
|Educational Role||Student ♦ Teacher|
|Age Range||above 22 year|
|Educational Use||Research ♦ Reading|
|Education Level||UG and PG|
|Learning Resource Type||Article|
|Rights Holder||Institute of Electrical and Electronics Engineers, Inc. (IEEE)|
|Size (in Bytes)||465.12 kB|
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