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Author Avram, M. ♦ Avram, A. ♦ Iliescu, C. ♦ Manea, E. ♦ Voitincu, C.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2005
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Microfluidics ♦ Fluid dynamics ♦ Viscosity ♦ Silicon ♦ Micromachining ♦ Gears ♦ Wheels ♦ Biological system modeling ♦ Rotation measurement ♦ Thickness measurement
Abstract The purpose of this research was to model, design and fabricate a microdynamic system, using a four masks silicon micromachining process and sacrificial layers technique. The measurement principle is the detection of the rotation of a micromachining polysilicon gear wheels system with external diameters of 250 /spl mu/m, 200 /spl mu/m, 160 /spl mu/m and 3 /spl mu/m thickness combine the undercut and refill technique with pin-joint bearing permitting the fabrication of bushings that can be used, for example, to elevate the rotor away from the silicon surface. The microfluidic dynamic system consists of a gear wheels system, an electromagnetic micropump and a magnetic controller. Each device is fabricated by silicon micromachining technology and tested to obtain the specific characteristics.
Description Author affiliation: National Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania (Avram, M.)
ISBN 0780392140
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2005-10-03
Publisher Place Romania
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 1.44 MB
Page Count 4
Starting Page 223
Ending Page 226

Source: IEEE Xplore Digital Library