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Author Pothier, A. ♦ Blondy, P. ♦ Cros, D. ♦ Verdeyme, S. ♦ Guillon, P. ♦ Champeaux, C. ♦ Tristant, P. ♦ Catherinot, A.
Sponsorship IEEE-Electron Devices Soc. ♦ Minstr. Educ. & Res. ♦ IEEE-Romania Sect. ♦ Electron Devices Chapter
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2002
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Packaging ♦ Micromechanical devices ♦ Q factor ♦ Tunable circuits and devices ♦ Varactors ♦ Capacitors ♦ Circuit optimization ♦ Tuning ♦ Frequency ♦ Coupling circuits
Abstract In this paper, basic resonators including MEMS variable capacitor types are presented. MEMS structures allow tuning of the cell center frequency and input-output coupling. To improve the tunable resonator quality factor, the circuit is packaged using bulk micromachining techniques. MEMS varactors are associated in a parallel configuration to improve their quality factor. At 27 GHz, a semi-lumped resonator with a quality factor of 130 has been fabricated. MEMS varactors are not decoupled from the resonator to improve the Q, as it is usually done with low-Q semiconductor diodes.
Description Author affiliation: IRCOM, Limoges Univ., France (Pothier, A.; Blondy, P.; Cros, D.; Verdeyme, S.; Guillon, P.)
ISBN 0780374401
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2002-10-08
Publisher Place Romania
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 547.50 kB
Page Count 4
Starting Page 33
Ending Page 36

Source: IEEE Xplore Digital Library