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Author Sankaranarayanan, S.K.R.S. ♦ Singh, R. ♦ Bhethanabotla, V.R.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2011
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Lithium niobate ♦ Diamond-like carbon ♦ Substrates ♦ Surface acoustic wave devices ♦ Frequency response ♦ Surface acoustic waves
Abstract Operating SAW devices in the GHz frequency range can enable detection of single molecules by imparting high sensitivities and low detection limits. In the present work, we used 3-D coupled field structural as well as fluid-solid interaction finite element models to study the acoustic wave propagation characteristics of diamond/AlN/LiNbO multi-layered piezoelectric surface acoustic wave devices under the influence of fluid loading for applications in chemical and biological sensing. These devices were studied as a method to increase device frequency and sensitivity, and maintain standard fabrication procedures. The operating frequency of SAW devices is directly proportional to the substrate's acoustic wave velocity; hence the highest acoustic wave velocity material (diamond) is needed for fabrication of MEMS GHz frequency devices. The aluminum nitride piezoelectric layer also has a very high acoustic wave velocity and a fairly large piezoelectric coupling coefficient along its c-axis, in comparison to other piezoelectric materials. Although recent experimental investigations have realized GHz frequency devices based on such multilayered substrates, very little is known about the acoustic wave propagation characteristics in these devices. Identifying the optimum configuration and thickness of the various layers involved still represents a challenge, which is addressed in this work.
Description Author affiliation: Sensors Research Laboratory, Department. of Chemical and Biomedical Engineering, University of South Florida, Tampa, 33620, USA (Singh, R.; Bhethanabotla, V.R.) || Center for Nanoscale Materials, Argonne National Laboratory, IL-60459, USA (Sankaranarayanan, S.K.R.S.)
ISBN 9781424492909
ISSN 19300395
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2011-10-28
Publisher Place Ireland
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
e-ISBN 9781424492893
Size (in Bytes) 740.38 kB
Page Count 4
Starting Page 743
Ending Page 746

Source: IEEE Xplore Digital Library