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Author Ono, A. ♦ Kitamura, S. ♦ Mori, K.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2006
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Capacity planning ♦ Time factors ♦ Tellurium ♦ Fabrication ♦ Upper bound ♦ Investments ♦ Manufacturing ♦ Semiconductor device manufacture ♦ Production facilities ♦ Risk management
Abstract It is difficult to plan capacities of a semiconductor wafer fabrication with constraints of queue time which means a waiting time from the end of a step to the start of the next step for warranting production quality. If the queue time constraints could not be kept, the product is scrapped or reprocessed for qualitative recovery, and production efficiency remarkably decreases. This paper proposes an evaluation method which enables capacity planning of a fab with the queue time constraints, and shows its validity by simulation experiments. Furthermore we present an effectiveness of the method by applying to actual production lines.
Description Author affiliation: Renesas Technol. Corp., Itami (Ono, A.)
ISBN 9784990413804
ISSN 1523553X
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2006-09-25
Publisher Place Japan
Rights Holder ISSM
Size (in Bytes) 2.22 MB
Page Count 4
Starting Page 49
Ending Page 52


Source: IEEE Xplore Digital Library