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Author Jamain, U.M. ♦ Ibrahim, N.H. ♦ Rahim, R.A.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2014
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Zinc oxide ♦ Resonant frequency ♦ Piezoelectric materials ♦ Electric potential ♦ Analytical models ♦ Force ♦ Micromechanical devices ♦ COMSOL Multi Physics ♦ MEMS ♦ piezoelectric energy harvester ♦ ZnO
Abstract This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 $μN/m^{2}$ mechanical force applied.
Description Author affiliation: Kulliyyah of Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia (Jamain, U.M.; Ibrahim, N.H.; Rahim, R.A.)
ISBN 9781479957606
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2014-08-27
Publisher Place Malaysia
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 1.33 MB
Page Count 4
Starting Page 263
Ending Page 266


Source: IEEE Xplore Digital Library