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Author Kole, A. ♦ Jeongsik Sin ♦ Woo Ho Lee ♦ Popa, D. ♦ Agonafer, D. ♦ Stephanou, H.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2006
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Polymers ♦ Micropumps ♦ Actuators ♦ Assembly ♦ Silicon on insulator technology ♦ Electrothermal effects ♦ Silicon compounds ♦ Etching ♦ Performance analysis ♦ Solid modeling
Abstract This paper presents a design of micropump, which is an assembly of silicon micromachined actuator with a polymer tube diaphragm. The pump actuation principle is electrothermal expansion of a silicon V-beam structure, and its expansion is amplified through a lever structure to create greater diaphragm stroke as presented in J. Sin et al. (2004). Diffuser/nozzle structures are applied to direct the flow from an inlet to outlet port while the actuator provides pumping motion. Deep RIE (reactive ion etching) process is used to fabricate the pump structure on a SOI (silicon on insulator) wafer. Polymer tube is fabricated from Parylene conformal deposition process using a DRIE silicon mold and the tube structure is assembled with the silicon actuator module. FEM analysis is performed on the tube structure and the simulation results show that the stroke of the tube diaphragm becomes much smaller than original actuator stroke, mainly due to the constrained tube geometry in silicon structure. When the tube stroke is combined with the diffusion/nozzle flow mechanism, the resultant flow rate of the pump was about 160nl/min, which will be suitable for low flow rate and high precision applications. Further study is on going to build prototype of the pump
Description Author affiliation: Autom. & Robotics Res. Inst., Texas Univ., Fort Worth, TX (Kole, A.; Jeongsik Sin; Woo Ho Lee; Popa, D.; Agonafer, D.; Stephanou, H.)
ISBN 0780395247
ISSN 10879870
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2006-05-30
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 600.03 kB
Page Count 1,324
Starting Page 6
Ending Page 1329


Source: IEEE Xplore Digital Library