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Author Wisitsoraat, A. ♦ Patanasetagul, V. ♦ Tuantranont, A. ♦ Poonnikorn, N.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2006
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Fabrication ♦ Piezoresistance ♦ Micromechanical devices ♦ Tactile sensors ♦ Indium tin oxide ♦ Predictive models ♦ Sputtering ♦ Finite element methods ♦ Biomembranes ♦ Chromium
Abstract In this work, we develop a new non-silicon-based piezoresistive MEMS tactile sensor by a low-cost fabrication process. Prior to fabrication, the structure was designed and simulated by finite element simulation software to predict the device behaviors. The MEMS tactile sensor with a trampoline membrane structure has been fabricated by successive sputtering of Cr, Al, AlN, indium tin oxide (ITO), and Au layers through electroplated Ni micro-shadow masks over an 8 mm-thick photoresist sacrificial layer on a glass substrate. In addition, the gauge factor of the ITO piezoresistive material was studied as a function of sputtering parameter including oxygen flow rate and film thickness to optimize the sensitivity of the sensor. It was found that the 0.4 mm-thick ITO film deposited with no oxygen flow provide an optimum gauge factor of ~650. The fabricated tactile sensor has been tested for displacement and force sensing and a high sensitivity of 0.2 mV/muN has been achieved.
Description Author affiliation: Nat. Electron. & Comput. Technol. Center, Pathumthani (Wisitsoraat, A.; Patanasetagul, V.; Tuantranont, A.)
ISBN 1424403758
ISSN 19300395
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2006-10-22
Publisher Place South Korea
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 1.97 MB
Page Count 4
Starting Page 1317
Ending Page 1320


Source: IEEE Xplore Digital Library