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Author Minghao Nie ♦ Dachuan Liu ♦ Liguo Dong ♦ Qiancheng Zhao ♦ Zhenchuan Yang ♦ Guizhen Yan
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2013
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Gyroscopes ♦ Sensors ♦ Electrodes ♦ Fabrication ♦ Force ♦ Micromechanical devices ♦ Sensitivity
Abstract This paper presents a lateral-axis MEMS tuning-fork gyroscope with nozzle-optimized squeeze-film sensing element fabricated using silicon-on-glass process. The proposed nozzle-optimized sensing element is able to provide large capacitive output which is beneficial for mode-splitting design, while it is also compatible with standard 3-masks silicon-on-glass process without any increasing of fabrication complexity. The fabricated gyroscope was vacuum-packaged to ~100Pa and then mounted on an analog PCB for close-loop drive and pickoff read-out. The measured sensitivity was 9.1 mV/(°/s) while the non-linearity is 0.913% with the full scale of 1000°/s. The tested noise floor is 0.02°/s $/Hz^{1/2}.$
Description Author affiliation: Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China (Minghao Nie; Dachuan Liu; Liguo Dong; Qiancheng Zhao; Zhenchuan Yang; Guizhen Yan)
ISBN 9781467346429
ISSN 19300395
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2013-11-03
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 2.08 MB
Page Count 4
Starting Page 1
Ending Page 4


Source: IEEE Xplore Digital Library