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Author Hai Liu ♦ Ferrer, D. ♦ Banerjee, S.K.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2009
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Nanocrystals ♦ Hafnium oxide ♦ Nonvolatile memory ♦ Temperature ♦ Robustness ♦ Educational institutions ♦ Flash memory ♦ Potential well ♦ Dielectrics ♦ Degradation
Abstract Nanocrystal (NC) floating gate flash memory is considered to be one of the most promising candidates to replace conventional highly doped polysilicon floating gate flash memory technology widely used today. [1] Metal NCs is more desirable compared to its semiconductors to work as charge storage storage node, because metals usually have large work function and can be engineered down to 1 nm without decreasing potential well depth. [2, 3] However, most metal NCs are easily oxidized and diffuse into the surrounding dielectric under high temperature process conditions, resulting in bad NC-dielectric interface quality and the degradation of the memory performance.[4] In this paper, for the first time, we present an approach using Ruthenium (Ru) NC buried in HfO matrix to work as charge storage nodes, which can create a robust NC- high K dielectric interface. Combined with some advantages of Ruthenium, good memory device performance can be achieved.
Description Author affiliation: Microelectronics Research Center, The Univ. of Texas at Austin, USA (Hai Liu; Ferrer, D.; Banerjee, S.K.)
ISBN 9781424460304
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2009-12-09
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 261.61 kB
Page Count 2
Starting Page 1
Ending Page 2


Source: IEEE Xplore Digital Library