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Author Haitao Ding ♦ Jian Cui ♦ Xuesong Liu ♦ Xiaozhu Chi ♦ Zhenchuan Yang ♦ Guizhen Yan
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2008
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Gyroscopes ♦ Atmospheric measurements ♦ Bandwidth ♦ Atmospheric modeling ♦ Fabrication ♦ Capacitors ♦ Q factor ♦ Low voltage ♦ Stability ♦ Temperature control
Abstract In this paper, a highly double-decoupled selfoscillation gyroscope is presented. Deliberate frame demonstrates small cross talk between drive mode and sense mode of less than 0.5% simulated by FEM tool and 1.35% verified by experimental measurements. Tested results exhibit that the bandwidth of the structure has a good immunity to fabrication imperfections. With the deployment of area-varied capacitors and high aspect-ratio structures, large quality factors and low drive voltage are achieved operating at atmospheric pressure, which are 217 and 97 for drive mode and sense mode, respectively, with a 1Vpeak-peak AC drive voltage and 10 V DC bias. Measured scale factor is 10.7 mv/deg/s with a $R^{2}-nonlinearity$ of 0.12% in the range of plusmn300deg/s. The noise equivalent rate is $0.0013deg/s/Hz^{1/2}$ $(=4.68deg/h/Hz^{1/2})$ over 100 Hz bandwidth. The bias stability can achieve 1deg/s for a 6-hour measurement and 0.3deg/s for 120 seconds without any temperature control method employed (1-sigma).
Description Author affiliation: Inst. of Microelectron., Peking Univ., Beijing (Haitao Ding; Jian Cui; Xuesong Liu; Xiaozhu Chi; Zhenchuan Yang; Guizhen Yan)
ISBN 9781424425808
ISSN 19300395
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2008-10-26
Publisher Place Italy
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 555.72 kB
Page Count 4
Starting Page 674
Ending Page 677

Source: IEEE Xplore Digital Library