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Author Sparks, D. ♦ Smith, R. ♦ Cripe, J. ♦ Schneider, R. ♦ Najafi, N.
Sponsorship IEEE Sensors Council
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2003
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Micromechanical devices ♦ Silicon ♦ Resonance ♦ Wafer bonding ♦ Gettering ♦ Glass ♦ Resonant frequency ♦ Electrodes ♦ Packaging machines ♦ Microfluidics
Abstract In this paper, a micromachined Coriolis mass flow sensor is described. Key to portability, this resonant silicon sensor is vacuum packaged at the chip-level. A new MEMS gettering method was developed to accomplish high-vacuum packaging. Fluids flow through machined silicon microtubes. The tubes are driven electrostatically and monitored capacitively. Test data and applications are presented.
Description Author affiliation: Integrated Sensing Syst. Inc., Ypsilanti, MI, USA (Sparks, D.; Smith, R.; Cripe, J.; Schneider, R.; Najafi, N.)
ISBN 0780381335
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2003-10-22
Publisher Place Canada
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 257.10 kB
Page Count 3
Starting Page 337
Ending Page 339


Source: IEEE Xplore Digital Library