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Author Acar, C. ♦ Shkel, A.M.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2004
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Capacitance ♦ Electrodes ♦ Assembly ♦ Voltage ♦ Gyroscopes ♦ Silicon ♦ Fingers ♦ Laboratories ♦ Optical device fabrication ♦ Optical noise
Abstract This paper reports a novel design concept that aims to increase the detection and actuation capacitances in micromachined devices beyond the fabrication process limitations. The approach is based on designing the stationary components of the electrodes attached to a moving stage that permanently locks into the desired position before the operation of the device, to minimize the electrode gap with a simple assembly step. The concept has been implemented in bulk-micromachined prototype gyroscopes, and the experimental results have successfully demonstrated the feasibility of the assembly concept. It is experimentally shown that over an order of magnitude of capacitance increase is achieved in the same foot-print of the device, without additional fabrication steps.
Description Author affiliation: Microsystems Lab., California Univ., Irvine, CA, USA (Acar, C.; Shkel, A.M.)
ISBN 0780386922
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2004-10-24
Publisher Place Austria
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 2.83 MB
Page Count 4
Starting Page 268
Ending Page 271

Source: IEEE Xplore Digital Library