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Author Wood, G.S. ♦ Chun Zhao ♦ Sari, I. ♦ Kraft, M. ♦ Suan Hui Pu
Sponsorship IEEE
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2015
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Springs ♦ Micromechanical devices ♦ Sensitivity ♦ Resonant frequency ♦ Couplings ♦ Acoustic beams ♦ Electrodes ♦ sensor ♦ Resonators ♦ stiffness change ♦ MEMS ♦ mode-localization
Abstract The mode-localization effect exhibited in electrostatically-coupled microelectromechanical systems (MEMS) resonators was demonstrated using a pair of rectangular clamped-clamped beams that were fabricated using a silicon-on-insulator (SOI) based process. The response of the amplitude ratio of the resonating beams at the fundamental mode frequencies to a change in the stiffness of one of the beams was characterized. Beams with different widths were fabricated and tested, with up to 13 times improvement in sensitivity to relative stiffness change being reported for a device with 20 μιη widths, compared to 10 μιη widths. In addition, when compared to the state-of-the-art, the devices reported up to 2.8 times improvement in sensitivity.
Description Author affiliation: Univ. of Southampton Malaysia Campus, Nusajaya, Malaysia (Suan Hui Pu) || Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK (Wood, G.S.; Chun Zhao; Sari, I.) || Montefiore Inst., Univ. of Liege, Liege, Belgium (Kraft, M.)
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2015-11-01
Publisher Place South Korea
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
e-ISBN 9781479982035
Size (in Bytes) 2.29 MB
Page Count 4
Starting Page 1
Ending Page 4


Source: IEEE Xplore Digital Library