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Author Kochhar, A. ♦ Yamamoto, Y. ♦ Teshigahara, A. ♦ Hashimoto, K.-Y. ♦ Tanaka, S. ♦ Esashi, M.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2015
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Surface acoustic wave devices ♦ Aluminum nitride ♦ Surface acoustic waves ♦ Substrates ♦ Transducers ♦ Films ♦ c-axis tilted thin film ♦ NSPUDT ♦ SAW devices ♦ Sc-doped Aluminum Nitride thin film
Abstract This paper reports finding of directionality in the 44% Scandium doped Aluminum Nitride thin film based surface acoustic wave devices. Some previously reported SAW devices using bulk substrates showed higher power of acoustic signals in either forward or backward direction depending on their crystal orientations and are called natural single-phase unidirectional transducers (NSPUDT). As these reports were based on bulk substrates, for the first time, we report NSPUDT using c-axis tilted Scandium doped Aluminum Nitride thin film SAW devices on sapphire. In addition, we also examined the c-axis tilt dependency to improve transducers return loss. It is worth to put in notice here that our observance of directionality is specifically in sezawa wave. Hence, the comparison for both acoustic waves i.e. Rayleigh and Sezawa is also reported.
Description Author affiliation: Chiba Univ., Chiba, Japan (Hashimoto, K.-Y.) || Res. Labs., DENSO Corp., Nisshin, Japan (Yamamoto, Y.; Teshigahara, A.) || Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan (Tanaka, S.) || WPI (Adv. Inst. for Mater. Res.), Tohoku Univ., Sendai, Japan (Kochhar, A.; Esashi, M.)
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2015-04-12
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
e-ISBN 9781479988662
Size (in Bytes) 867.96 kB
Page Count 4
Starting Page 633
Ending Page 636


Source: IEEE Xplore Digital Library