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Author Kwan-sun ♦ Chi-Ok Hwang ♦ Taeyoung Won
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2005
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Indium ♦ Silicon ♦ Boron ♦ Atomic measurements ♦ Electronic mail ♦ CMOS process ♦ Nanoscale devices ♦ Impurities ♦ Ion implantation ♦ CMOS technology
ISBN 142440083X
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2005-12-07
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 318.45 kB
Page Count 2
Starting Page 422
Ending Page 423

Source: IEEE Xplore Digital Library