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Author Sujan, Y. ♦ Vasuki, B. ♦ Uma, G.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2012
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Resonant frequency ♦ Sensitivity ♦ Strain ♦ Cavity resonators ♦ Solid modeling ♦ Sensors ♦ Micromechanical devices ♦ Surface micromachining ♦ T-shaped beam ♦ Pressure sensor ♦ MEMS
Abstract A resonant pressure sensor with a provision for incorporating appropriate actuation and detection mechanism using fully surface micromachined process is presented in this paper. The pressure sensing element is a T-shaped resonating beam encapsulated beneath a polysilicon rectangular diaphragm and fully enclosed in a sealed vacuum cavity. This design enables high pressure sensitivity, miniature chip size and as well as good environmental isolation. The proposed structure is evaluated for pressure sensitivity theoretically and numerically using MEMS CAD tool CoventorWare. The pressure sensitivity of the sensor with a T-shaped 1.2 μm thick beam is found to be 10.2%/bar with the beam resonance frequency of about 792 kHz.
Description Author affiliation: Department of Instrumentation and Control Engineering, National Institute of Technology, Tiruchirappalli 620 015, India (Sujan, Y.; Vasuki, B.; Uma, G.)
ISBN 9781467323956
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2012-09-19
Publisher Place Malaysia
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
e-ISBN 9781467323963
Size (in Bytes) 905.50 kB
Page Count 5
Starting Page 271
Ending Page 275


Source: IEEE Xplore Digital Library