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Author Jacquot, A. ♦ Liu, W.L. ♦ Chen, G. ♦ Fleurial, J.P. ♦ Dauscher, A. ♦ Lenoir, B.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2002
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Fabrication ♦ Thermoelectricity ♦ Dielectric materials ♦ Geometry ♦ Semiconductor materials ♦ Silicon ♦ Biomembranes ♦ Analytical models ♦ Semiconductor films ♦ Leg
Abstract A thermoelectric in-plane micro-generator has been fabricated using compatible standard semiconductor technologies. The active material is a fine-grained polycrystalline silicon material laid on a dielectric membrane sustained by a silicon frame. A simplified analytical one-dimensional model of the micro-generator has been made to find the optimum thermoelectric film thickness and thermoelectric leg length. The optimal geometry of the micro-generator depends on the thermal properties and emissivity of the materials as well as on its working environment i.e. air or vacuum and on its operational mode. These investigations have been extended to a more realistic geometry of micro-generators and to more efficient thermoelectric materials, using a numerical model. The performance of such micro-generators is predicted for various materials and geometry combinations.
ISBN 0780376838
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2002-08-29
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 303.02 kB
Page Count 4
Starting Page 561
Ending Page 564


Source: IEEE Xplore Digital Library