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Author Udrea, F. ♦ Gardner, J.W.
Sponsorship IEEE Sensor Council
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2002
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Gas detectors ♦ CMOS technology ♦ Temperature sensors ♦ Intelligent sensors ♦ Thermal sensors ♦ Silicon ♦ Biomembranes ♦ Chemical sensors ♦ Automotive engineering ♦ Electrodes
Abstract In this paper we review the development of CMOS compatible gas sensors, introduce the recent concept of SOI smart gas sensors, and discuss in detail the advantages/disadvantages of micromachined SOI technology compared to bulk technology. We begin by discussing the concept of integrated sensors and the need for low-cost, reliable and battery-operated gas-sensing systems. We continue with a review of the main types of CMOS-compatible gas sensors together with their advantages/drawbacks and future challenges. We introduce SOI technology and describe its importance in microelectronics followed by a detailed discussion of its use as a generic platform technology for gas sensors. Finally, we present a brief report on our novel approach to making high-temperature low-power (HTLP) SOI gas sensors using CMOS micro-FET heaters.
Description Author affiliation: Dept. of Eng., Cambridge Univ., UK (Udrea, F.)
ISBN 0780374541
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2002-06-12
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 877.52 kB
Page Count 6
Starting Page 1379
Ending Page 1384


Source: IEEE Xplore Digital Library