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Author Yeong-Lin Lai ♦ Yueh-Hung Chen
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2005
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Radiofrequency microelectromechanical systems ♦ Switches ♦ Radio frequency ♦ Stress ♦ Voltage ♦ Resonance ♦ Mechanical systems ♦ Communication switching ♦ Micromechanical devices ♦ Finite element methods
Abstract In this paper, analysis of characteristics of capacitive membrane-type RF MEMS switches, have been developed on the basis of the finite element method. Both the static and modal analyses of the switches are conducted. The characteristics including the displacement, stress, effective stiffness constant, natural frequency, and switching time are studied. The structures of the switches are critical for determination of switch performance. How the characteristics of the capacitive membrane-type RF MEMS switches are affected by the structures of the switches is investigated comprehensively
Description Author affiliation: Dept. of Mechatronics Eng., National Changhua Univ. of Educ. (Yeong-Lin Lai; Yueh-Hung Chen)
ISBN 142440083X
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2005-12-07
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 448.96 kB
Page Count 2
Starting Page 326
Ending Page 327

Source: IEEE Xplore Digital Library