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Author Goustouridis, D. ♦ Kaltsas, G. ♦ Nassiopoulou, A.G.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2004
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Accelerometers ♦ Solids ♦ Silicon ♦ Frequency ♦ Thermal sensors ♦ Sensor phenomena and characterization ♦ Acceleration ♦ Life estimation ♦ Calibration ♦ Electronic packaging thermal management
Abstract A Si thermal accelerometer without solid proof mass has been developed and characterized. The device is CMOS compatible and consists of a polysilicon heater and two thermopiles, situated symmetrically on each side of a heater. A thick porous silicon (PS) layer assures thermal isolation from the Si substrate. The operating principle is based on the movement induced thermal convection variations between the heater and the hot thermopile contacts, which is caused by the movement of the hot air on top of the heater relative to the sensor die. The porous silicon thermal accelerometer (PSTA) was tested in a specially designed vibration system for different frequencies and accelerations. In each case, the response was compared to a commercial accelerometer. Appropriate read out electronics were fabricated in order to reduce the noise of the thermopiles and to amplify the signal. The dependence of the response on applied power and the surrounding environment was also studied.
Description Author affiliation: IMEL/NCSR Demokritos, Athens, Greece (Goustouridis, D.)
ISBN 0780386922
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2004-10-24
Publisher Place Austria
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 410.96 kB
Page Count 4
Starting Page 848
Ending Page 851


Source: IEEE Xplore Digital Library