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Author Sonderman, Thomas
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2010
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Foundries
Description Author affiliation: Manufacturing Systems and Technology, GlobalFoundries, USA (Sonderman, Thomas)
ISBN 9781457703928
ISSN 1523553X
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2010-10-18
Publisher Place Japan
Rights Holder ISSM
Size (in Bytes) 27.02 MB
Page Count 42
Starting Page 1
Ending Page 42


Source: IEEE Xplore Digital Library