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Author Zhang, H. ♦ Marma, M.S. ♦ Eun Sok Kim ♦ McKenna, C.E. ♦ Thompson, M.E.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2005
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Film bulk acoustic resonators ♦ Mercury (metals) ♦ Gold ♦ Acoustic sensors ♦ Acoustic signal detection ♦ Resonant frequency ♦ Sensor phenomena and characterization ♦ Acoustic measurements ♦ Zinc ♦ Thick film sensors
Abstract This paper describes an FBAR (film bulk acoustic resonator) mass sensor for detecting Hg in liquid. With a thin Au film deposited on the surface of an FBAR, the FBAR's resonant frequency shifts as Hg amalgamates on the Au surface. The FBAR sensor is measured to be capable of detecting a concentration of $10^{-19}$ M $Hg^{2}$ (i.e., 0.2 ppb $Hg^{21}).$ Other cations such as $K^{1},$ Ca2 , $Mg^{2},$ $Zn^{21},$ $Ni^{2}$ have shown to have little or no effect on the resonant frequency of the FBAR. Responses of the FBAR sensors coated with various thicknesses of Au film to a same concentration of $Hg^{2}$ have been compared. Finally, an FBAR with a thiol-compound-modified Au film is shown to have a smaller frequency shift than that with a pure Au film
Description Author affiliation: Dept. of Electr. Eng.-Electrophys., Southern California Univ., Los Angeles, CA (Zhang, H.)
ISBN 0780390563
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2005-10-30
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 1.72 MB

Source: IEEE Xplore Digital Library