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Author Banerjee, A. ♦ Pandey, S.S. ♦ Banerjee, N. ♦ Hasan, N. ♦ Mastrangelo, C.H.
Sponsorship IEEE
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2015
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Electrodes ♦ Springs ♦ Switches ♦ Voltage measurement ♦ Micromechanical devices ♦ Electrostatics ♦ Torque
Abstract This paper presents an implementation of an electrostatic MEMS switch which can be triggered by a very low input voltage in the range of ~50mV. This device can thus be used as a zero-DC power signal threshold detector suitable for waking up larger battery powered systems. The device consists of an electrically conductive torsional see-saw paddle with four balanced electrodes. The device is symmetrically biased by applying the same voltage at its inner electrodes leading to bistable behavior at flat or collapsed equilibrium positions. The use of elevated symmetric bias softens the springs such that the transition of the paddle state from flat to collapsed can be triggered when a few mV are applied to one of its outer electrode thus causing device snapping in and switch closure.
Description Author affiliation: Dept. of Electr. & Comput. Eng., Univ. Of Utah, Salt Lake City, UT, USA (Banerjee, A.; Pandey, S.S.; Banerjee, N.; Hasan, N.; Mastrangelo, C.H.)
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2015-11-01
Publisher Place South Korea
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
e-ISBN 9781479982035
Size (in Bytes) 0.96 MB
Page Count 4
Starting Page 1
Ending Page 4


Source: IEEE Xplore Digital Library