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Author Wakuda, T. ♦ Nagata, K. ♦ Kojima, M.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©1997
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Waste heat ♦ Water heating ♦ National electric code ♦ Power supplies ♦ Air conditioning ♦ Cogeneration ♦ Cooling ♦ Water resources ♦ Cleaning ♦ Production systems
Abstract NEC Corp. has constructed an energy-saving semiconductor plant incorporating various energy-saving techniques for its electric power supply, air conditioning system, and heat source, including a cogeneration system, clean room air heating through use of waste heat from equipment cooling water, and free cleaning, in order to actively promote energy saving in semiconductor production. The new plant has successfully achieved a 18% reduction in energy consumption from the level in the existing plants.
Description Author affiliation: Manuf. Coordination Div., NEC Corp., Tokyo, Japan (Wakuda, T.)
ISBN 0780337522
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 1997-10-06
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 475.76 kB

Source: IEEE Xplore Digital Library